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Everything about Stepper
Photolithographic Tool
A stepper or wafer stepper is a device used in the manufacture of integrated circuits (ICs). It is an essential part of the process of photolithography, which creates millions of microscopic circuit elements on the surface of silicon wafers out of which chips are made. It is similar in operation to a slide projector or a photographic enlarger. The ICs that are made form the heart of computer processors, memory chips, and many other electronic devices. Wikipedia →
🧭 Start here: a 6-step reading path
- Read the overview: StepperA 5-minute orientation
- Skim a recent paper: SimpleFOC: A Field Oriented Control (FOC) Library for Controlling Brushless Direct Current (BLDC) and Stepper MotorsInfluential work since 2022
- Pick up a classic book: The high stepperThe most-reprinted book on the subject
- Read the landmark paper: High-performance nonlinear feedback control of a permanent magnet stepper motorCited 280 times
- Go sideways: PhotolithographyA closely related topic
- Go sideways: PhotomaskA closely related topic
📖 Definitions
Noun A person or animal that steps, especially energetically or high.
Noun A dancer.
Noun A dancer in a step show.
Noun A kind of electric motor that advances in steps rather than smoothly.
🏆 Landmark papers (most cited)
High-performance nonlinear feedback control of a permanent magnet stepper motor
DNA Machines: Bipedal Walker and Stepper
Design concept development of a spherical stepper for robotic applications
Position control of a PM stepper motor by exact linearization
Kinematic design and commutation of a spherical stepper motor
Modified Total-Body Recumbent Stepper Exercise Test for Assessing Peak Oxygen Consumption in People With Chronic Stroke
A Third-Order Sliding-Mode Controller for a Stepper Motor
Microstepping Using a Disturbance Observer and a Variable Structure Controller for Permanent-Magnet Stepper Motors
🆕 Influential since 2022
SimpleFOC: A Field Oriented Control (FOC) Library for Controlling Brushless Direct Current (BLDC) and Stepper Motors
Design and validation of a dual-functional damper based on a stepper motor for energy harvesting and vibration control
Single‐Step‐Lithography Micro‐Stepper Based on Frictional Contact and Chiral Metamaterial
The 6-minute stepper test and the sit-to-stand test predict complications after major pulmonary resection via minimally invasive surgery: a prospective inception cohort study
Kraken: a wirelessly controlled octopus-like hybrid robot utilizing stepper motors and fishing line artificial muscle for grasping underwater
📚 Books worth reading
- 📕The high stepperTom Ryder · 1961
Working Out LoudJohn Stepper · 2015- 📕Stepper motorCornelis de Kramer · 1994
- 📕StepperBrian Castro · 1997
High steppers, fallen angels, and lollipopsKathleen Odean · 1988
No Hill Too High for a StepperMike Mahan · 2012- 📕Graphical user interface for stepper motor based filter wheel controlT. A. Rajesh · 2008
- 📕ULTRATECH STEPPER, INCICON Group Ltd. · 2000
Ranked by number of editions on Open Library, a rough measure of how lasting a book is.
🔗 Related topics
- Photolithography Photolithography (also known as optical lithography) is a process that uses light to transfer a pattern onto a photoresist layer deposited on a sample…
- Photomask A photomask (also simply called a mask) is an opaque plate with transparent areas that allow light to shine through in a defined pattern. Photomasks are…
- Resolution enhancement technologies Resolution enhancement technologies are methods used to modify the photomasks in the lithographic processes used to make integrated circuits (ICs or "chips")…
- Computational lithography Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution…
- Micralign The Micralign was a family of aligners introduced in 1973 by Perkin-Elmer. Micralign was the first projection aligner, a concept that dramatically lowered…
- Resist (semiconductor fabrication) In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. A…
- Contact lithography Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask…
- Aligner (semiconductor) An aligner, or mask aligner, is a system that produces integrated circuits (IC) using the photolithography process. It holds the photomask over the silicon…