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Everything about Photomask
Photolithographic tool
A photomask is an opaque plate with transparent areas that allow light to shine through in a defined pattern. Photomasks are commonly used in photolithography for the production of integrated circuits to produce a pattern on a thin wafer of material. In semiconductor manufacturing, a mask is sometimes called a reticle. Wikipedia →
🧭 Start here: a 6-step reading path
- Read the overview: PhotomaskA 5-minute orientation
- Skim a recent paper: Comparison of EUV Photomask Metrology Between CD-AFM and TEMInfluential work since 2022
- Pick up a classic book: Modifications developed to improve X-ray detection devicesThe most-reprinted book on the subject
- Read the landmark paper: Development of paper-based microfluidic analytical device for iron assay using photomask printed with 3D printer for fabrication of hydrophilic and hydrophobic zones on paper by photolithographyCited 132 times
- Go sideways: PhotolithographyA closely related topic
- Go sideways: Computational lithographyA closely related topic
📖 Definitions
Noun A transparent quartz block marked with many high-resolution images; a series of them are used in the photolithography of integrated circuits, one for each layer.
🗂️ The subject at a glance
🏆 Landmark papers (most cited)
Development of paper-based microfluidic analytical device for iron assay using photomask printed with 3D printer for fabrication of hydrophilic and hydrophobic zones on paper by photolithography
Dynamic Photomask‐Assisted Direct Ink Writing Multimaterial for Multilevel Triboelectric Nanogenerator
Immersion Lithography: Photomask and Wafer-Level Materials
Machine learning for inverse lithography: using stochastic gradient descent for robust photomask synthesis
Near-field sub-diffraction photolithography with an elastomeric photomask
Level-set-based inverse lithography for photomask synthesis
Electron-beam-based photomask repair
Grayscale photomask fabricated by laser direct writing in metallic nano-films
🆕 Influential since 2022
Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Hyperparameter optimization for convolutional neural network by opposite-based particle swarm optimization and an empirical study of photomask defect classification
Polymer-stabilized cholesteric liquid crystal films with broadband reflection formed by photomask polymerization
Coassembling Hydroxypropyl Cellulose into a Chiral Nematic Composite and Patternization with a Photomask and Direct Ink Writing
Dynamic photomask directed lithography based on electrically stimulated nematic liquid crystal architectures
📚 Books worth reading
- 📕Modifications developed to improve X-ray detection devices · 1994
- 📕Modifications developed to improve X-ray detection devices · 1994
Ranked by number of editions on Open Library, a rough measure of how lasting a book is.
🔗 Related topics
- Photolithography Photolithography (also known as optical lithography) is a process that uses light to transfer a pattern onto a photoresist layer deposited on a sample…
- Computational lithography Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution…
- Phase-shift mask Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography…
- Resolution enhancement technologies Resolution enhancement technologies are methods used to modify the photomasks in the lithographic processes used to make integrated circuits (ICs or "chips")…
- Stepper A stepper or wafer stepper is a device used in the manufacture of integrated circuits (ICs). It is an essential part of the process of photolithography…
- EUV lithography Extreme ultraviolet lithography (EUVL or simply EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits (ICs). It…
- Next-generation lithography Next-generation lithography (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies in development which are…
- Aligner (semiconductor) An aligner, or mask aligner, is a system that produces integrated circuits (IC) using the photolithography process. It holds the photomask over the silicon…