Everything about Phase-shifting interferometry
Technique used to measure 3D topography using shifted interference
Phase-shifting interferometry (PSI) is an optical metrology technique for measuring surface topography and wavefront shape to sub-nanometre precision. It works by recording a short sequence of interferograms, each captured with a known phase offset between the reference and object beams, then solving for the surface height at every pixel simultaneously. Height measurement repeatability is typically below 1 nm, independent of field size. Before PSI, the standard approach was to trace fringe centres in a static interferogram by eye or with image-processing software, which was a labour-intensive, sparse, and unable to resolve the sign of surface deviations from a single image. Wikipedia →
🧭 Start here: a 6-step reading path
- Read the overview: Phase-shifting interferometryA 5-minute orientation
- Skim a recent paper: Accurate white light phase-shifting interferometry under PZT scanning errorInfluential work since 2022
- Pick up a classic book: Application and optimisation of the spatial phase shifting technique in digital speckle interferometryThe most-reprinted book on the subject
- Read the landmark paper: Phase-shifting speckle interferometryCited 520 times
- Go sideways: Coherence scanning interferometryA closely related topic
- Go sideways: InterferometryA closely related topic
📖 Definitions
No dictionary entry for this exact phrase.
🗂️ The subject at a glance
🏆 Landmark papers (most cited)
Phase-shifting speckle interferometry
Two-wavelength phase shifting interferometry
Multiple-wavelength phase-shifting interferometry
Phase shifter calibration in phase-shifting interferometry
Generalized phase-shifting interferometry
Optoelectronic information encryption with phase-shifting interferometry
Vibration in phase-shifting interferometry
Accuracy of phase shifting interferometry
🆕 Influential since 2022
Accurate white light phase-shifting interferometry under PZT scanning error
Fast and robust two-frame random phase-shifting interferometry without pre-filtering
Adaptive phase-shifting interferometry based on a phase-shifting digital holography algorithm
Phase Shifting Approaches and Multi-Channel Interferograms Position Registration for Simultaneous Phase-Shifting Interferometry: A Review
Co-phase state detection for segmented mirrors by dual-wavelength optical vortex phase-shifting interferometry
📚 Books worth reading
- 📕Application and optimisation of the spatial phase shifting technique in digital speckle interferometryJan Burke · 2000
- 📕Digital optical measurementPramod K. Rastogi · 2015
Optical imaging and microscopyFu-Jen Kao, Peter Török · 2003
Analog and digital holography with MATLABGeorges T. Nemetallah · 2015
Interferometry in Speckle LightPierre Jacquot · 2000
Few-Body Problems in Physics '99Shinsho Oryu · 2000
Ranked by number of editions on Open Library, a rough measure of how lasting a book is.
🔗 Related topics
- Coherence scanning interferometry Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during…
- Interferometry Interferometry is a technique which uses the interference of superimposed waves to extract information. Interferometry typically uses electromagnetic waves…
- Spectral interferometry Spectral interferometry (SI) or frequency-domain interferometry is a linear technique used to measure optical pulses, with the condition that a reference…
- Common-path interferometer A common-path interferometer is a class of interferometers in which the reference beam and sample beams travel along the same path. Examples include the…
- Point diffraction interferometer A point diffraction interferometer (PDI) is a type of common-path interferometer. Unlike an amplitude-splitting interferometer, such as a Michelson interferomet…
- Holographic interferometry Holographic interferometry (HI) is a technique that enables the measurement of static and dynamic displacements of objects with optically rough surfaces…
- Digital holography Digital holography is the acquisition and processing of holograms from a digital sensor array, typically a CCD camera or a similar device, and also refers…
- Optical coherence tomography Optical coherence tomography (OCT) is a high-resolution imaging technique with most of its applications in medicine and biology. OCT uses coherent near-infrared…