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Everything about Coherence scanning interferometry
Method for measuring optical surfaces
Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference microscopy technique for areal surface topography measurement. The term "CSI" was adopted by the International Organization for Standardization (ISO). Wikipedia →
🧭 Start here: a 6-step reading path
- Read the overview: Coherence scanning interferometryA 5-minute orientation
- Skim a recent paper: Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometryInfluential work since 2022
- Pick up a classic book: Optical coherence tomographyThe most-reprinted book on the subject
- Read the landmark paper: On tilt and curvature dependent errors and the calibration of coherence scanning interferometryCited 93 times
- Go sideways: White light scannerA closely related topic
- Go sideways: InterferometryA closely related topic
📖 Definitions
No dictionary entry for this exact phrase.
🗂️ The subject at a glance
No outline available.
🏆 Landmark papers (most cited)
On tilt and curvature dependent errors and the calibration of coherence scanning interferometry
Coherence scanning interferometry: linear theory of surface measurement
Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry
Noise Reduction in Coherence Scanning Interferometry for Surface Topography Measurement
3D modeling of coherence scanning interferometry on 2D surfaces using FEM
Effects of defocus on the transfer function of coherence scanning interferometry
Comparison of envelope detection techniques in coherence scanning interferometry
Cement paste surface roughness analysis using coherence scanning interferometry and confocal microscopy
🆕 Influential since 2022
Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry
Three-Dimensional Topography of High-Aspect Ratio Trenches by Sample-Induced Aberration-Compensable Coherence Scanning Interferometry
Robust vertical scanning interferometry at a long coherence length
Topography reconstruction of high aspect ratio silicon trench array via near-infrared coherence scanning interferometry
Self-elimination of phase noise in coherence scanning interferometry for nano-scale measurement
📚 Books worth reading
- 📕Optical coherence tomographyBoyd, Samuel M.D., Rosario Brancato · 2009
Handbook of Coherent-Domain Optical MethodsV. V. Tuchin · 2013
Optical imaging and microscopyFu-Jen Kao, Peter Török · 2003
Ranked by number of editions on Open Library, a rough measure of how lasting a book is.
🔗 Related topics
- White light scanner A white light scanner (WLS) is a device for performing surface height measurements of an object using coherence scanning interferometry (CSI) with spectrally-br…
- Interferometry Interferometry is a technique which uses the interference of superimposed waves to extract information. Interferometry typically uses electromagnetic waves…
- White light interferometry White light interferometry is a non-contact optical method for surface height measurement on 3D structures with surface profiles varying between tens of…
- Holographic interferometry Holographic interferometry (HI) is a technique that enables the measurement of static and dynamic displacements of objects with optically rough surfaces…
- Phase-shifting interferometry Phase-shifting interferometry (PSI) is an optical metrology technique for measuring surface topography and wavefront shape to sub-nanometre precision.…
- Digital holographic microscopy Digital holographic microscopy (DHM) is digital holography applied to microscopy. Digital holographic microscopy distinguishes itself from other microscopy…
- Common-path interferometer A common-path interferometer is a class of interferometers in which the reference beam and sample beams travel along the same path. Examples include the…
- Optical coherence tomography Optical coherence tomography (OCT) is a high-resolution imaging technique with most of its applications in medicine and biology. OCT uses coherent near-infrared…