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Everything about Electron backscatter diffraction

Scanning electron microscopy technique

Electron backscatter diffraction (EBSD) is a scanning electron microscopy (SEM) technique used to study the crystallographic structure of materials. EBSD is carried out in a scanning electron microscope equipped with an EBSD detector comprising at least a phosphorescent screen, a compact lens and a low-light camera. In the microscope an incident beam of electrons hits a tilted sample. As backscattered electrons leave the sample, they interact with the atoms and are both elastically diffracted and lose energy, leaving the sample at various scattering angles before reaching the phosphor screen forming Kikuchi patterns (EBSPs). The EBSD spatial resolution depends on many factors, including the nature of the material under study and the sample preparation. They can be indexed to provide information about the material's grain structure, grain orientation, and phase at the micro-scale. EBSD is used for impurities and defect studies, plastic deformation, and statistical analysis for average misorientation, grain size, and crystallographic texture. EBSD can also be combined with energy-dispersive X-ray spectroscopy (EDS), cathodoluminescence (CL), and wavelength-dispersive X-ray spectroscopy (WDS) for advanced phase identification and materials discovery. Wikipedia →

🧭 Start here: a 6-step reading path

  1. Read the overview: Electron backscatter diffractionA 5-minute orientation
  2. Skim a recent paper: Characterization of the radial microstructural evolution in LWR UO2 using electron backscatter diffractionInfluential work since 2022
  3. Pick up a classic book: Electron backscatter diffraction in materials scienceThe most-reprinted book on the subject
  4. Read the landmark paper: Bragg's Law diffraction simulations for electron backscatter diffraction analysisCited 280 times
  5. Go sideways: Transmission Kikuchi diffractionA closely related topic
  6. Go sideways: Angus J. WilkinsonA closely related topic

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